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DC Power
AE MDX-L12M Power Supply 3152272-001
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Controller
AE MDX20K (3152194-038A) LZ Master Delta Magnetron Drive
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RF Match
AE Multi-Functional Adapter 3155077-003A
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RF Generator
AE Paramount 6013 13.56MHz 6000W RF Generator
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DC Power
AE PE2 10K Sputtering Power Supply 3157600-000
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DC Power
AE Rapid F 6 kW Remote Plasma Source 3151801-003 RPS
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RF Match
AE RF MATCHER BOX 3155169-006
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RF Match
AE RF MATCHING 3155301-013 0190-47668
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RF Generator
AE RFG-1251 RF Generator M/N 3155107-102 660-024637-200
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MFC
Aera FC-770AC N2 100SCCM
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MFC
Aera FC-770AC N2(O2) 100SCCM
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MFC
Aera FC-770AC O2 100SCCM
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MFC
Aera FC-980 MFC Mass Flow Controller Range 200 SCCM
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MFC
Aera FC-D986CY-BF
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MFC
Aera FC-DNR785CT-BW Ar 5SLM
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MFC
Aera TC FM-PA8610 N2 60SLM
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